毫秒激光致光学薄膜损伤阈值的测试与分析.docVIP

2011年第25卷第2期 测试技术学报V ol.25 N o.2 2011(总第86期JOURNAL OF TEST AND MEASUREMENT TECHNOLOGY (Sum N o.86文章编号:1671 7449(201102 0122 06 毫秒激光致光学薄膜损伤阈值 的测试与分析 戴 罡,陆 建,刘 剑,秦 渊,倪晓武 (南京理工大学理学院,江苏南京210094 摘 要: 根据ISO 11254分别测量了脉宽1ms,波长1064nm 激光作用下T iO 2 SiO 2高反膜、增透膜的损 伤阈值,结合高分辨率CCD 和光学显微镜观测了损伤形貌,分析了毫秒量级激光损伤光学薄膜的损伤机 理.结果表明:脉宽1ms 激光作用下T iO 2 SiO 2增透膜的损伤阈值为高反膜的2.4倍,损伤区域为若干分离 的损伤点,认为损伤是由膜层中含有的缺陷或杂质引起的.读数显微镜的结果显示,长脉冲激光作用下薄膜 元件的损伤厚度为(180 5 m.研究结果可供脉宽为ms 量级的激光与光学薄膜相互作用的基础研究提供 参考. 关键词: 毫秒激光;激光损伤;损伤阈值;损伤机理 中图分类号: T N244 文献标识码:A doi :10.3969 j.issn.1671 7449.2011.02.006 The Measurement and Analysis of Millisecond Laser Induced Damage of Two kinds of Classical Coating Components DAI Gang,LU Jian,LIU Jian,QIN Yuan,N I Xiaow u (Colleg e of Science,Nanjing U niversity of Science and T echnology,Nanjing 210094,China Abstract : Laser induced damage thresholds of T iO 2 SiO 2hig h reflector and anti reflector w ith pulse duration 1ms,w aveleng th 1064nm are investigated according to ISO 11254.The damage morphologies are recorded by CCD w ith hig h resolution.The mechanisms of 1ms laser induced damage of optical component are dis cussed.Laser induced damage threshold of anti reflector is 2.4times of high reflector,and the isolated dam ages on coatings show that the damages are induced by impurities or the defects in coatings.The damage depth of optical component is 180 5 m by using reading microscope.T hese research results in the paper w ill prov ide help for the basic research of long pulse laser interaction w ith optical coatings. Key words :millisecond laser;laser damage;damage threshold;damage mechanism 目前,激光技术朝着两个不同方向发展:高峰值功率密度的短脉冲、超短脉冲激光和大能量的长脉冲激光.其中长脉冲激光和短脉冲(ns、超短脉冲激光(ps 或fs相比在空气中传播时效率更高.只是因为ps 和fs 激光具有很高的峰值功率密度,因而在空气中传输时易产生光学击穿 [1,2]和自聚焦现象[3],而长脉冲激光对应的功率密度远小于108W cm 2,在空气传输的过程中吸收较小,且不会使空气产生电离 击穿,也不会发生自聚焦现象,因而传输损耗远小于短脉冲激光.其次,在与材料相互作用过程中,短脉 冲激光能够使物体表面的温度瞬时上升到5 103K 以上,形成高温高密度的等离子体将屏蔽后续激光. 而较低功率密度的长脉冲激光作用在物体上时几乎不形成的等离子体,后续激光几乎不受影响地作用在靶材上,因而长脉冲激光的能量耦合效率高于短脉冲激光.最后,就单脉冲能量而言,长脉冲激光要比 收稿日期:2010 09 2