comsol等离子体放电二维模型.docVIP

Solved with COMSOL Multiphysics 5.2 DC Glow Discharge Introduction DC glow discharges in the low pressure regime have long been used for gas lasers and fluorescent lamps. DC discharges are attractive to study because the solution is time independent. This model shows how to use the DC Discharge interface to set up an analysis of a positive column. The discharge is sustained by emission of secondary electrons at the cathode. Model Definition The DC discharge consists of two electrodes, one powered (the anode) and one grounded (the cathode). The positive column is coupled to an external circuit: 1000 Ω Cathode Plasma Anode 1 pF V Figure 1: Schematic of the DC discharge and external circuit. DOMA I N EQUATI ONS The electron density and mean electron energy are computed by solving a pair of drift-diffusion equations for the electron density and mean electron energy. Convection of electrons due to fluid motion is neglected. For detailed information on electron transport see Theory for the Drift Diffusion Interface in the Plasma Module User’s Guide. ? n ( ) + ? ? [– ne(μe ? E) – De ? ?ne] = Re ?t e ? n ( ) + ? ? [– nε(με ? E) – Dε ? ?nε] + E ? Γe = Rε ε ?t where: 1 | D C G L O W D I S C H A R G E Solved with COMSOL Multiphysics 5.1 Γe = – (μe ? E)ne – De ? ?ne The electron source Re and the energy loss due to inelastic collisions Rε are defined later. The electron diffusivity, energy mobility and energy diffusivity are computed from the electron mobility using: De = μeTe, με 5 ? ? μ = -- , Dε = μεTe ? ? e 3 The source coefficients in the above equations are determined by the plasma chemistry using rate coefficients. Suppose that there are M reactions which contribute to the growth or decay of electron density and P inelastic electron-neutral collisions. In general P M. In the case of rate coefficients, the electron source term is given by: ? Re = xjkjNnne j = 1 where xj is the mole fraction of the target species for reaction j, kj is the rate coefficient for reaction