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? 2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda ? Photoresist – Types of Photoresist – Negative Versus Positive Photoresists ? Photoresist Physical Properties ? Conventional I-Line Photoresists – Negative I-Line Photoresists – Positive I-Line Photoresists ? Deep UV (DUV) Photoresists ? Photoresist Dispensing Methods Spin Coat ? 2001 by Prentice Hall Semiconductor Manufacturing Technology by Michael Quirk and Julian Serda Types of Photoresists ? Two Types of Photoresist – Positive Resist – Negative Resist ? CD Capability – Conventional Resist – D