(位移传感器专业英语）Nanometrology4.pptVIP

(位移传感器专业英语〕Nanometrology4; Quantification of surface topography is of fundamental importance for the evaluation of the generated surface; high resolution and wide measuring range being highly desirable for the evaluation of toolworkpiece interaction. Workpiece roughness also influences properties such as wear, friction, adhesion, light scattering capacitance and corrosion, even more in the microscale. Often these measurements are not possible with classical profilometers, due to the reduced dimensions or to the softness of the material to be investigated. Similarly also working tools can be f