半导体生产过程.pptxVIP

EE 4345 - Semiconductor Electronics Design ProjectSilicon ManufacturingGroup MembersYoung Soon SongNghia NguyenKei WongEyad FanousHanna KimSteven HsuHISTORY19th Century - Solid-State Rectifiers1907 - Application of Crystal Detector in Radio Sets1947 - BJT Constructed by Bardeen and Brattain1959 – Integrated Circuit Constructed by KilbySemiconductor Manufacturing ProcessSemiconductor Manufacturing ProcessFundamental Processing Steps1.Silicon Manufacturing a) Czochralski method. b) Wafer Manufacturing c) Crystal structure2.Photolithography a) Photoresists b) Photomask and Reticles c) Patterning