洁净室测试方案讲课稿.docxVIP

IVO A11 CLEANROOM PACKAGE CLEANROOM PERFORMANCE TESTS CONTENT CLEANROOM LAY OUT AND REQUIREMENT CLEANROOM PERFORMANCE TEST ITEM CERTIFICATION OF CLEANROOM PERFORMANCE AIR FLOW VELOCIT YV OLUME TEST FILTER LEAKAGE TEST AIR BORNE PARTICLE COUNT TEST ILLUMINATION TEST NOISE LEVEL TEST ROOM PRESSURIZATION TEST TEMPERATURE AND HUMIDITY TEST REFERENCE Certification of Cleanroom Performance Test Item No. Test Item ISO 1.5 Class 10 at 0.1 卩 m ISO 5 Class 100 at 0.5 卩 m ISO 6 Class 1K at 0.5 卩 m 1 2 3 1 2 3 1 2 3 A Air Flow Velocity Test O X X O X X O X X B Filter Leakage Test O X X O X X O X X C Air