提高三点法测量精度的研究.docVIP

提高三点法测量精度的研究 摘　要　目的　研究进一步提高三点法测量圆度及轴系运动误差精度的方法.方法　分析了测头读数及角位置误差对圆度各次谐波及圆周各点测量精度的影响；提出了三点法测量系统的优化策略与算法；研究了三点法测量误差的分布与传递规律；提出了克服测头定位误差以及3个测头的灵敏度不一致影响的软件校正方法.结果　圆度各次谐波的最大测量误差相对于传统三点法减小67%，圆度及其各次谐波的测量不确定性明显降低.结论该方法能明显提高三点法测量精度. 关键词　三点法； 圆度； 轴系运动误差； 误差分离 分类号　TG806 A Study on Improving the Accuracy of(for Roundness and Spindle Motion Error Measurements with Three-Point Method Zhang Yuhua　　Wang Xiaolin (Department of Optical Engineering, Beijing Institute of Technology, Beijing　100081) Zhang Guoxiong　　Li Zhen (Precision Instrument and Opto-electronics Engineering College of Tianjin University, Tianjin　300072) Abstract　Aim　To improve the accuracy of measuring roundness and spindle mo-tion error with three-point method. Methods　The effects of the reading error and the misalignment of the probes on the accuracy of measuring and all the harmonics of roundness were analyzed; The strategy and the algorithm for optimizing the parameters of the measuring system were proposed; The distribution and propagation patterns of the measured errors for all the harmonics of roundness were studied in detail; A software for correcting the errors caused by the measurement error of the angle positions of the probes and the sensitivity difference between three probes was presented. Results The maximum error of measuring the harmonics of roundness was reduced by 67% in comparison with that by the traditional three-point method. Conclusion　The accuracy of roundness measured by the improved three-point method gets a distinct improvement. Key words　three-point method; roundness; spindle motion error; error separation 　　高等学校博士学科点专项科研基金资助课题为提高三点法［1］的测量精度，前人倾注了巨大精力，但其研究大都限于仅从数学上考虑了如何避免三点法的谐波加权函数ω(k)=1+a2e-jkφ2+a3e-jkφ3造成的谐波抑制［2～4］，而忽视了测量误差对测量精度的影响.文献［5］虽然注意到上述问题，但未能透彻分析测头读数及定位误差与圆度测量误差的关系.作者重点分析测头读数及定位误差对圆度测量精度的影响，研究系统的优化方法及谐波测量误差的传播规律，以进一步提高三点法测量精度. 1　三点法测量原理及精度分析 1.1　三点法测量原理 图1　三点法原理 三点法测量原理如图1所示.在工作圆周上布置3个测头Pi，它们与y轴的夹角为φi(φ1=0)，工作圆度为r(θn)，轴系径向运动误差的x，y向分量为x(θn)，y(θn)，各测头的输出为 其中　Ri为测头Pi的零起读数； θn为采样