全场衍射法测微小形变量.docxVIP

全场衍射法测微小形变量 摘要：激光全场衍射测量，它可以用于测量被测物体整个表面的 变形量，通过CCD采集计算机成像，编写数字图像处理程序对被测 物体表面变形信号进行处理取得被测物表面的变形信息数据，观察衍 射条纹以及变化全过程。 关键词：测微小型变量；全场衍射；CCD； Deformation of the Whole Diffraction Measurement Abstract: Laser full-court diffraction measurement, it can be used to measure the deformation on the surface of the object to be tested, by CCD acquisition computer imaging, digital image processing program is the deformation of the surface to be measured signal processing deformation information data on the surface of the object to be tested, observation of diffraction stripe and change process. Keywords: micro