直线度误差评定的英文参考文献a.pdfVIP

ARTICLE IN PRESS International Journal of Machine Tools Manufacture 49 (2009) 285–290 Contents lists available at ScienceDirect International Journal of Machine Tools Manufacture journal homepage: A method for measuring the guideway straightness error based on polarized interference principle Ling-Jian Zhu a,b,, Lin Li b, Jun-Hua Liu a, Zhong-Hua Zhang c a Xi’an Jiaotong University, 28 Xianning Road, Xi’an, Shaanxi 710049, b Xi’an University of Technology, 5 a South Road, Xi’an, Shaanxi 710048, c National Institute of Metrology P.R. , 100013, a r t i c l e i n f o a b s t r a c t Article history: This paper presents a new method for measuring guideway straightness error based on the polarized Received 25 June 2008 interference principle and affords a new way to measure straightness error in real-time with high Received in revised form precision. Firstly, the method is demonstrated and analyzed in theory, and then the layout of the optical 21 October 2008 modulator and the polarization angle detecting unit are discussed in s. Finally, a calibration Accepted 30 October 2008 Available online 17 November 2008 process is introduced with linear function based on the least-square method. Calibration results show that the correlation coefficients R2 of the fitting curves are above 0.9999 and the standard error of the Keywords: estimated value is less than