PALL颇尔-IPA中过滤器的颗粒去除效率评估-英文.pdf

UC-006 Particle removal efficiency evaluation of filters in IPA Tomoyuki Takakura and Shuichi Tsuzuki Nihon Pall Ltd. 46, Kasuminosato, Ami-machi, Inashiki-gun, Ibaraki 300-0315 Japan tomoyuki_takakura@ charged state because electrostatic interaction is a factor that Abstract – As part of the study to investigate filter performance affects PRE: Platinum particle covered with Polyethylenimine in the actual conditions, particle removal efficiency evaluation (Tanaka Kikinzoku Kogyo, Pt PEI), Zirconia particle (Nissan method of filters in isopropyl alcohol was developed. Three Chemical Industries, ZrO ), and gold particle covered with 2 kinds of particles which exhibit each different charged state in Polyvinylpyrrolidone (Tanaka Kikinzoku Kogyo, Au PVP). the chemical, and the sizes of which are around 10 nm, were We evaluated size distribution and zeta potential of these selected as test particles for the evaluation. Pall 10-nm-rated particles in IPA by dynamic light scattering (DLS, Zetasizer surface-modified PTFE membrane filter was evaluated with the Nano ZS, Malvern). particles. The result was compared with the removal efficiency in deionized water. Also, the effect of adsorption on the removal Particle