国外经典MEMS课件.pdfVIP

An Introduction of MEMS Outline • What is MEMS? • Fabrications • Case Study The name of Micro Systems • US: MEMS (MicroElectroMechanical Systems) • Japan: Micromachines • Europe: MST (Micro System Technology) • Scale of device: roughly from 1 μm-1mm. Benefits of MEMS • Miniaturized: save materials, save power, faster time response,better performance • Integration: integrated with IC and other systems, reduce system size cost • Batch fabrication: cheap, disposable.Most importa