TFT制程简介PPT课件.pptxVIP

.1TFT制程简介说明For : NBLCM F.A. TeamAuthor: Jessica _ Lin Date:2009/1/8 .2目录:TFT制作流程图TFT制作过程说明TFT五层制程说明TFT的制作类型TFT的工作原理补充说明:1.实际显微镜下的比对2.TFT-LCD的工作说明其它… .3TFT制作流程图:PreCleanThin Film Deposition1.Macro-Inspection2.MonitorPR coatingExposureDevelopingADICD measurement3.AOIDry or Wet EtchingResist strippingAEICD measurementEtch rate monitor 4.AOITest keyFunction testLaser repairPhoto ProcessPreCleanThin Film ProcessEtching ProcessFinal testing .4TFT制程区域划分:薄膜区--各层之薄膜成长黄光区--曝光.显影蚀刻区--图案成形及去光阻测试区--array及外部电路之检查Equipment:Plasma CVD ,Sputter-----薄膜 Nikon stepper , Canon scaner----黄光 Dry , Wet Etching----蚀