超声喷雾热解法制备掺杂ZnO薄膜光学性能的研究的中期报告.docxVIP

超声喷雾热解法制备掺杂ZnO薄膜光学性能的研究的中期报告 摘要： 本文介绍了一种新型的超声喷雾热解法制备掺杂ZnO薄膜的方法，并对其光学性能进行了研究。采用X射线衍射法和扫描电镜对制备的样品进行了表征，结果表明：所制备的ZnO薄膜表面较为均匀，晶体结构良好。利用紫外可见分光光度计测试了掺杂ZnO薄膜的光学性能，数据表明：掺杂ZnO薄膜在紫外光区域有较好的透过率，可以用于制备紫外光传感器等器件。研究结果为制备高性能ZnO薄膜提供了新思路。 关键词：超声喷雾热解法；掺杂ZnO薄膜；光学性能；紫外光传感器 Abstract: This paper introduces a new method for preparing doped ZnO films by ultrasonic spray pyrolysis, and studies its optical properties. The prepared samples were characterized by X-ray diffraction and scanning electron microscopy. The results show that the prepared ZnO film has a uniform surface and good crystal structure. The optical prop