-什么是等离子体技术（附：原文及翻译）-.docxVIP

PAGE 1 PAGE 1 什么是等离子体技术（附：原文及翻译） 1、精选优质文档倾情为你奉上In the 2nd phase of building up to full capacity, the new plasma technology, which isdeveloped by SST, will be used to produce high purity silicon.The technologies used today in the production of Silicon via the TCS and Monosilane route using the so called “Siemens Technology“, are disco 2、ntinuous batch processes. In both cases the reactor has to be prepared with filaments (starter rods) and has to be conditioned. After reaching of the maximum diameter, which is defined by the accessible power and the reactor geometry, the reactor is cooled down and opened to unload the polysilicon.  3、The necessary loading and unloading procedure requires long downtime periods. The production of highpurity Silicon using the conventional TCS Siemens technology is due to the large-scale area high temperatures and resulting radiation losses, very energy and cost intensive. The Monosilane technology  4、used by SST in the first phase contributes already essentially to energy and cost reduction, due to the process characteristics much lower deposition temperatures.The product polysilicon out of the Siemens reactors has the shape of a long rod, is brittle, hard and therefore not directly usable as so  5、lar cell or in electronic devices. The silicon has to be crushed, where necessary cleaned and etched, melted and recrystallized. All this needs a considerable amount of energy.Due to the complete conversion and the absence of Chlorine, Monosilane is predestined to drive new techniques to produce hig  6、h purity Silicon. The employment of SSTs innovative plasma technology, will get the Monosilane (SiH4) to decompose in a very small space to form Silicon and Hydrogen.Monosilane is decomposed in a plasma to form a gas stream. Through the introduction of the gas str