ISO 14644-18:2023 洁净室和相关受控环境 - 第 18 部分:消耗品适用性评估.pdfVIP

  • 20
  • 0
  • 约14.07万字
  • 约 46页
  • 2024-03-24 发布于江苏
  • 举报

ISO 14644-18:2023 洁净室和相关受控环境 - 第 18 部分:消耗品适用性评估.pdf

INTERNATIONALISO

STANDARD14644-18

Firstedition

2023-10

Cleanroomsandassociatedcontrolled

environments—

Part18:

Assessmentofsuitabilityof

consumables

Sallespropresetenvironnementsmaîtrisésapparentés—

Partie18:Évaluationdel’aptitudeàl’emploidesconsommables

Referencenumber

ISO14644-18:2023(E)

©ISO2023

ISO14644-18:2023(E)

COPYRIGHTPROTECTEDDOCUMENT

©ISO2023

Allrightsreserved.Unlessotherwisespecified,orrequiredinthecontextofitsimplementation,nopartofthispublicationmay

bereproducedorutilizedotherwiseinanyformorbyanymeans,electronicormechanical,includingphotocopying,orpostingon

theinternetoranintranet,withoutpriorwrittenpermission.PermissioncanberequestedfromeitherISOattheaddressbelow

orISO’smemberbodyinthecountryoftherequester.

ISOcopyrightoffice

CP401•Ch.deBlandonnet8

CH-1214Vernier,Geneva

Phone:+41227490111

Email:copyright@

Website:

PublishedinSwitzerland

ii©ISO2023–Allrightsreserved

ISO14644-18:2023(E)

Contents

文档评论(0)

1亿VIP精品文档

相关文档