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- 2024-04-25 发布于上海
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长春光机所深紫外光学薄膜技术研究进展
张立超;高劲松
【摘要】DevelopmentsofDeepUltraviolet(DUV)coatingtechnologiesinChangchunInstituteofOptics,FineMechanicsandPhysics,ChineseAcademyofSciences(CIOMP)werereviewed.SomeresearcheswerecarriedoutsystematicallytomeettherequirementsofhighqualityDUVopticalsystemsforcoatingprocesses.Twospecialsystemswerecustomizedforevaporationandionbeamsputterdepositiontechniquesrespectively,whichcouldcoatthesubstratesforp410mmopticalelements.Afteroptimizingdepositiontechnology,thetypicaltransmissionforaboth-sidecoatingsam
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