MEMS光纤法珀压力传感器的设计及解调方法实现.docxVIP

MEMS光纤法珀压力传感器的设计及解调方法实现

曹群;贾平岗;熊继军;张海瑞;洪应平;房国成

【摘要】基于外界压力引起敏感膜片形变导致腔长变化来实现压力信号传感的原理，提出了一种MEMS光纤法珀压力传感器的设计，建立了传感器敏感膜片的挠度变化与膜厚、半径及施加压力的关系理论模型，并在此基础上进行了膜片的MATLAB二维数值仿真和ComsolMultiphysics三维数值仿真，并完成了FP压力敏感头的制作，进而设计了能够应用于光纤传感的解调方法，搭建了光纤传感的压力测试系统并进行了相关实验，利用所设计的解调方法对实验数据进行处理，进而对压力传感器的性能及特性进行了测试和验证。实验结果表明，传感器测试曲线线性度良好，与数值仿真结果基本一致，在100kPa的量程范围内其灵敏度可达62.3nm/kPa，温度敏感系数为0.023μm/℃，测量精度3.93%，且最小压强分辨率为1.29kPa，证实了该MEMS光纤法珀压力传感系统具有一定的可行性。%AkindofMEMSopticalfiberFabry-Perotpressuresensorwasproposedbasedonthepressuresensingprinciplewhichduetothechangeofcavitylengthcausedbythedeformationofsensitivediaphragmwhenpressureapplied.Thesensor’stheoreticalmodelbetweensensitivediaphragmdeflectionvariationwithfilmthickness,radiusandloadingpressurewasestablished.Onthebasis,thetwo-dimensionalsimulationusingMATLABandthree-dimensionalnumericalsimulationbyComsolMultiphysicssoftwarewasperformedandtheprocessingfabricationofFPpressuresensingpartwasrealizedaswell.Thusthedemodulationmethodwhichcanbeappliedtotheopticalfibersensingwasdesignedandrelatedexperimentsweretakenonaftertheimplementationofopticalfibersensingpressuretestingsystem.Byemployingthedesigneddemodulationmethod,thesensor’sperformanceandcharacteristicscanbetestedandverified.Theexperimentalresultsindicatethatthelinearityofsensor’smeasuredcurveisgoodandbroadlyconsistentwiththeresultsofnumericalsimulation,thesensitivityunder100kPaisabout62.3nm/kPawithatemperaturesensitivitycoefficientof0.023μm/℃,themeasuredresolutionandprecisionare1.29kPaand3.93%respectivelythatconfirmedthemethodofMEMSopticalfiberpressuresensingsystemperformsapotentialpossibility.

【期刊名称】《传感技术学报》

【年(卷),期】2015(000)008

【总页数】8页(P1141-1148)

【关键词】光纤传感;法珀腔;MEMS工艺;解调方法;MATLAB;ComsolMultiphysics

【作者】曹群;贾平岗;熊继军;张海瑞;洪应平;房国成

【作者单位】中北大学电子测试技术国家重点实验室，太原030051;中北大学仪器科学与动态测试教育部重点实验室，太原030051;中北大学电子测试技术国