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WETProcessIntroduction;PurposeofWetCleaningProcess;PurposeofWetCleaningProcess;WetCleaning(Pre-treatment);WetProcess;ChemicalsInvolved;Wetbench;PurposeofPre-cleanistoremovethelastunwantedoxidelayerandpreparesurfacefreeofmetalliccontaminantsandgoodPCfornextoxidation.;;EtchingoffnativeoxideleavinghydrophobicSisurface,repelsH2O,thatispronetoH2Omark
Asamethodtopassivatesurface,H2O2/SC1/SC2lastisused.
;WhatisH2Omark?;Whatistheimpactofwatermark?;;DIWtankisforrinsingwaferascleanaspossiblebeforegoingintothenextchemicaltanktopreventcross-contaminationorbeforeleavingthehood.
DIWcanoverfloworquickdumprinse(QDR).OverflowisverystableflowofDIWandgivesgoodPCcontrol.Itmakesuseofdiffusionanddilution.QDR,ontheotherhandmakesuseofextradragforcewhenDIWdumpitisfastatremovingacidtrace,butsincethereismoreagitationinthetank,itmayresultinhigherPC.ControloftheDIWtankandsurroundingcleanlinessisimportant.
DIWtankoverflowsatalltimeswithby-passflowtopreventbacteria.BacteriawillresultinPCmetalliccontamination.
;DIWcanbehotorcold-dependsonpreviousandnexttanks.
HotChemicalwillbefollowedbyHotDIW/ColdDIW;thisistopreventthermalshock.Forhighviscositychemical,HDIWrinsewillimprovesolubilityofthechemical,thusimprovethediffusionofchemicaltobulkofDIW,thisimprovestherinseefficiency.
ThereisalsotheDIWMegasonicTank(overfloworwithquickdumprinse).TheextraMegasonicpowerhelpsparticlereductionandimprovesrinsingefficiencyespeciallyforviscouschemical.
;DIWflow-rate.
ProcessTime.
DumpCycleProcessTimeforeachsequence.
MegasonicOnSequence.;;SC1withMegasonic
;ThemechanismproducingtheroughsurfaceistheNH4OHactsastheetchantoftheoxidewhileH2O2actsastheoxidant:
;Methodsofreducingthemicroroughnesscanbesummar
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