单点金刚石飞切技术的纵向纹路形成机理研究及抑制措施.pdfVIP

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单点金刚石飞切技术的纵向纹路

形成机理研究及抑制措施

金波佳，张剑锋

（中国工程物理研究院激光聚变研究中心，四川绵阳621900）

摘要：

单点金刚石飞切技术目前是大口径KDP晶体加工最有效的方法，一次加工即可形成高精度元件表面，但加工后表

面存在沿进给方向的纵向纹路，该纹路对元件的光学性能存在明显的影响。文中从纵向纹路的形成机理研究出发，通过调

整机床不同部件的接触刚度，使纵向条纹的频率和幅值发生变化，从而提高元件的光学性能。实验结果表明，减小机床横梁

与立柱之间的接触刚度时，纵向纹路的周期约为55mm，幅值约为40nm，满足了该晶体元件的性能指标。

关键词：

纵向纹路；单点金刚石飞切技术；接触刚度；空间周期

中图分类号:TG5文献标志码:粤文章编号：员园园圆原圆（2020）12原园150原园3

ResearchontheFormationMechanismandControlMeasuresofVerticalStripesofSinglePointDiamond

FlycuttingTechnology

JINBojia,ZHANGJianfeng

（LaserFusionResearchCenterofCAEP,Mianyang621900,China）

Abstract:SinglepointdiamondflycuttingtechnologyiscurrentlythemosteffectivemethodforprocessinglargescaleKDP

crystals.Afineopticasurfacewithhighprecisioncanbedirectlyproducedinoneprocessing,b