YST 1780-2025 氧化铟镓锌靶材标准立项发展报告.docxVIP

氧化铟镓锌靶材标准立项发展报告

StandardizationDevelopmentReport:IndiumGalliumZincOxideTarget

摘要

关键词：氧化铟镓锌；IGZO靶材；行业标准；薄膜晶体管；溅射镀膜；有色金属

Abstract

Withtherapidevolutionofdisplaypanels,touchscreens,andsemiconductorthin-filmdevicestowardhighresolution,largesize,andflexibility,high-performancesputteringtargetshavebecomeincreasinglycriticalascoreconsumables.IndiumGalliumZincOxide(IGZO)targets,owingtotheiramorphousthinfilmscharacterizedbyhighelectronmobility,excellentuniformity,andlow-temperaturedepositioncapability,havebecomethemainstreamchoiceforacti