原创力文档原子层沉积反应器中六氟化钨（WF6）前驱体输送的应用说明和协议 Application Notes and Protocols for Tungsten Hexafluoride (WF6) Precursor Delivery in ALD Reactors.pdfVIP
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- 2026-10-10 发布于广东
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MethodologicalApplication
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ApplicationNotesandProtocolsforTungsten
Hexafluoride(WF6)PrecursorDeliveryinALD
Reactors
Author:BenchChemTechnicalSupportTeam.Date:May2026
CompoundofInterest
CompoundName:Tungstenhexafluoride
CASNo.:7783-82-6
Cat.No.:B1630381
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