Al_Al2O3_Cu测控温薄膜材料的制备研究.docVIP

  Al/Al2O3/Cu 测控温薄膜材料的制备研究# 于佳音，崔新芳，练小正，乔英杰** （哈尔滨工程大学材料科学与化学工程学院，哈尔滨 150001） 5 10 摘要：本文针对液浮陀螺仪悬浮液的应用环境，设计出 Al/Al2O3/Cu 测控温材料。并采用阳 极氧化的方法在草酸与冰乙酸的电解液中制备了阳极氧化膜绝缘层，采用磁控溅射的方法制 备了温度敏感层。利用 SEM、AFM、光学显微镜等研究了阳极氧化膜和铜膜的表面形貌， 采用绝缘电阻测试仪对阳极氧化膜的绝缘性能进行测试。研究结果表明，阳极氧化工艺对阳 极氧化膜的绝缘性能以及热处理过程中的开裂行为都有一定影响。电流密度为 1.0~1.5A/dm2，冰乙酸浓度为 0.1~0.3mol/L，阳极氧化时间在 30min~60min 条件下制备的氧 化膜绝缘性能和抗开裂性能满足 Al/Al2O3/Cu 绝缘层要求。以该氧化膜为衬底制备铜膜刻蚀 后可得到连续的电阻条。 关键词：材料表面与界面；阳极氧化膜；铜膜；Al/Al2O3/Cu 材料 中图分类号：TN 371 15 The study on the preparation of Al/Al2O3/Cu measuring and controlling temperature thin film material YU Jiayin, CUI Xinfang, LIAN Xiaozheng, QIAO Yingjie (School of Material Science and Chemistry Engineering, Harbin Engineering University, 20 25 30 35 40 Harbin 150001) Abstract: In the present study, the Al/Al2O3/Cu measuring and controlling material was designed about the application environment of suspension in the liquid floated gyroscope. The anodizing technology was used to prepare the insulating layer in the oxalic acid and acetic acid electrolyte. The temperature sensitive layer was deposited by magnetron sputtering. The morphologies of the anodic film and Cu film were investigated by scanning electron microscope (SEM), atomic force microscope (AFM) and optical microscope (OM). The insulating property was tested by megohmmeter. The results showed that the insulating property and the crack behavior during heating of the anodic film are all effected by the anodizing condition. The insulating property and crack resistance during heating of the anodic film which formed in 0.3mol/L oxalic acid and 0.1~0.3mol/L acetic acid electrolyte, current density J=1.0~1.5A/dm2, anodizing time t=30~60min could satisfy the need of Al/Al2O3/Cu as the insulating layer. The Cu film on these anodic films can be made to available resistance pattern by etching. Keywords: surface and interface of materials; anodic film; Cu film; Al/Al2O3/Cu material 0 引言 液浮陀螺仪是惯性系统的核心元件，悬浮液温度是引起陀螺仪产生漂移角速度的关键因 [1] 仪温度测量和控制采用漆包铜线缠绕式温度传感器，长