精密运动平台线性自抗扰控制.docVIP

第 44 卷第 8 期 2013 年 8 月  中南大学学报(自然科学版) Journal of Central South University (Science and Technology)  Vol.44 No.8 Aug. 2013  精密运动平台线性自抗扰控制 陈兴林，刘川，武志鹏 (哈尔滨工业大学航天学院，黑龙江哈尔滨，150001) 摘要：基于高动态精密伺服运动平台系统模型提出一种线性自抗扰控制方法。该方法的控制器通过扩张状态观测 器观测系统的动态变化，补偿系统中的未建模动态和各种扰动，为减小系统的动态跟踪误差，再运用前馈对系统 的跟踪误差进行补偿。在此复合控制方式下，控制器实现自抗扰控制，前馈控制器很好地补偿误差，解决一般反 馈控制系统在提高控制精度与确保系统稳定性之间存在的矛盾。实验结果表明：提出的线性自抗扰控制方法改善 高动态精密伺服运动平台系统的动态性能和抗干扰能力，提高系统的定位精度。 关键词：自抗扰；前馈补偿；高动态精密伺服 中图分类号：TP273+.3 文献标志码：A 文章编号：1672?7207(2013)08?3210?06  Linear active disturbance rejection control used in precision motion platform CHEN Xinlin, LIU Chuan, WU Zhipeng (School of Astronautics, Harbin Institute of Technology, Harbin 150001, China) Abstract: A linear active disturbance rejection controller design for high dynamic precision servo system was presented. The controller is designed through an extended state observer to estimate the system’s state and compensate the variant dynamics of the system, the external disturbance, and other uncertainties. To improve the tracking performance of the dynamic system, the tracking error is added to the reference input and used as feed-forward error compensation. Under such a combined control method, the controller has the ability of active disturbance rejection, and the feed-forward error compensation controller compensates tracking error well, which makes a very good solution to the contradiction between the improving control accuracy and ensuring system stability in the general feedback control system. The experiments show that the linear active disturbance rejection controller design can improve the dynamic performance and the anti-jamming capability of the high dynamic precision servo system, and enhance the control precision. Key words: active disturbance rejection? feed-forward compensation? high dynamic precision servo  高动态精密伺服运动平台是光刻机的重要部件， 它要求在高速运动的情况下，在较短的行程内实现对 平台的精确定位与跟踪。以 ASML 已经商用的最先进 光刻机 Twinscan XT 1950i 机型为例，工作时最