He离子注入对Cu;Cr和Cu;Nb纳米金属多层膜力学性能的影响.pdfVIP

中国科技论文在线 He 离子注入对 Cu/Cr 和 Cu/Nb 纳米金属多 层膜力学性能的影响# 朱望波，牛佳佳，梁晓晴，刘刚，孙军** 5 （西安交通大学金属材料强度国家重点实验室，西安 710049） 摘要 ：Cu/Nb, Cu/Cr纳米金属多层膜具有多界面性和良好的力学性能，能够有效的阻挡入射的辐照离子， 并在辐照后保持良好的力学性能。本文中，我们用 5×1016cm-2，40keVHe+注入调制周期为 5nm-250nm 两 种铜系纳米金属多层膜，发现：随着两种薄膜调制周期减小1.注入离子的射程逐渐减小；2.注入形成的He Bubbles 尺寸逐渐增大；3.注入前后两种薄膜的硬度值逐渐增加，并且注入导致的硬度增加值逐渐减小。 10 我们通过多层膜界面能量随调制周期变化的规律，解释了发生上述变化的原因。 关键词：纳米金属多层膜；硬度；辐照；界面能量；He bubbles 中图分类号：TG113 The effect of He ion implantation on the mechanical 15 properties of Cu/Cr and Cu/Nb multilayers Zhu Wangbo, NIU Jiajia, Liang Xiaoqing, Liu Gang, SUN Jun (State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University,Xi'an 710049) Abstract: Cu/Nb and Cu/Cr nanostructured multilayers have multi-interface and good mechanical 20 properties. It is possible for them to effectively block incident ions and maintain good mechanical properties after irradiation. In this article, we use 5 ×1016cm-2，40keVHe+to implant Cu/Nb and Cu/Cr multilayers,which have a modulation period of 5nm to 250nm.We find that with the decrease of the modulation period gradually 1.the range of implanted He ions gradually decrease;2.the size of He bubbles formed by irradiatoin gradually increases;3.the hardness of the 25 two kind of films before and after He ions implantation decreases and the increased hardness induced by irradiation deceases.We have explained the reasons for the occurance of the above phenomena b