一种新型压阻式硅微二维加速度计设计.docVIP

一种新型的压阻式硅微二维加速度计的设计 张国军，陈　尚，薛晨阳，乔　慧，张开锐 （中北大学电子测试技术国家重点实验室　太原　030051） 摘　要：以压阻检测技术为基础并结合硅微MEMS加工技术设计了一种二维加速度计微结构, 期望利用该新型的结构提高加速度计的灵敏度，实现二维方向的加速度检测。该加速度计采用四个相互垂直的悬臂梁支撑中间有刚硬柱体的结构，通过利用合理布置的压敏电阻构成的惠斯通电桥测量水平面内两个方向的加速度。建立了该结构的数学模型并用有限元分析软件ANSYS对敏感弹性元件进行分析。最后对加工出的加速度计进行了相关的测试。测试结果表明：该加速度计水平面内两个方向的灵敏度高、线形度较好, X向灵敏度为0.755 2 mv/g,线性度为0.999 67，Y向灵敏度为0.683 3 mv/g，线性度为0.999 66。 关键词：二维加速度计；压阻效应；MEMS；ANSYS 中图分类号：TP212　　文献标识码：A　　国家标准学科分类代码：460.4020 The design of a novel piezoresistive two-axis accelerometer based on silicon Zhang Guojun, Chen Shang, Xue Chenyang, Qiao Hui, Zhang Kairui (National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China ) Abstract：A novel of Two-Axis accelerometer is presented in this paper, which is based on piezoresistive detection and fabricated on a single-crystalline-silicon using MEMS technology. It is desirable that the application of ingenious structure of the accelerometer may improve the sensitivity. The sensor consists of four vertical cantilever beams with attached cylinder in the center of the structure. By locating the resistor logically formed the Wheatstone birdge, this sensor can measure the acceleration in two-direction. The calibration method and finite element method (FEM) for the accelerometer are proposed. The test results are presented at last. The experiment results show that both the two direction of the accelerometer have high sensitivity and good linearity. The sensitivity of the X direction is 0.755 2 mv/g and Y is 0.683 3 mv/g, the linearity of the X direction is 0.999 67 and Y is 0.999 66. Key words：Two-Axis Accelerometer; piezoresistive effect; MEMS; ANSYS 1　引　　言 随着半导体和集成电路的发展,传感器开始向集成化,微型化发展,其特点是可以减小体积,减轻质量,多功能化,并且响应快和易加工。由于传感器这种特殊性,因此它可广泛应用于航空航天、军事、汽车、通讯等领域。例如在汽车领域,汽车越高档,则所用的MEMS传感器越多。而加速度传感器以其独特的功能,在MEMS传感器领域占有重要地位[1]。目前市场上常见的微加速度计按检测原理分类有: 压阻式、压电式、电容式、隧穿效应式、谐振式以及热敏式等[27]。其中,由于压阻式具有加工工艺简单,易于微型化,线性度好,容易批量生产等优点而备受关注。 常见的微加速度计产品都是单轴的,而微惯性系统以及其他一些应用场合往往需要双轴或者三轴的加速度计来检