温度对TiN_Ti多层膜微观结构和氧化行为影响.pdfVIP

第 22 卷 第 5 期 中 国 表 面 工 程 Vol.22 No.5 2009 年 10 月 CHINA SURFACE ENGINEERING October 2009 第 1 期 陈 爽等：铝阳极氧化膜的硫酸钇脉冲封闭 49 doi: 10.3969/j.issn.1007−9289.2009.05.004 温度对 TiN/Ti 多层膜微观结构和氧化行为的影响* 龚海飞，邵天敏，王喜眉 （清华大学摩擦学国家重点实验室，北京 100084) 摘 要：研究了 TiN/Ti 多层膜不同温度下的微观结构和氧化行为。采用阴极弧离子镀沉积的方法制备了 19 层调制周 期为 200 nm 的 TiN/Ti 多层膜及相应的 TiN 单层膜。采用高分辨场发射电子显微镜(HR–FESEM)、光学显微镜和 X 射 线衍射仪(XRD)分别对膜层断面结构、表面形貌和物相进行分析。结果表明，随着加热温度的升高，TiN 单层膜在 350℃ 时开始出现局部剥落，550℃出现大范围的剥落，而多层膜未发生剥落；相对 TiN 单层膜，TiN/Ti 多层膜具有层状结 构，其抗氧化能力有一定的提高。结合试验结果，讨论了 TiN/Ti 多层膜和 TiN 单层膜的工作温度。 关键词：TiN/Ti ；多层薄膜；微观结构；氧化行为 中图分类号：TH117.1 文献标识码：A 文章编号：1007–9287(2009)05–0020–06 Influence of Temperature on Microstructure and Oxidation of TiN/Ti Multilayer Coating GONG Hai–fei，SHAO Tian–min，WANG Xi–mei (State Key Laboratory of Tribology, Tsinghua University, Beijing 100084) Abstract: Microstructure and oxidation behavior of TiN/Ti multilayer coating were investigated. Cathode arc ion plating system was applied to prepare TiN/Ti multilayer coating with 19 sublayers and 200 nm modulating period Relevant TiN monolayer coating was also prepared for comparision. High-resolution field emission scanning electron microscope (HR–FESEM), optical microscope and X–ray diffraction (XRD) analysis were used to observe the cross-sectional microstructure, surface topography and phase, respectively. The experimental results showed that, with the heating temperature rising, partial area spalling at 350 ℃ and large area peeling at 550 ℃ occurred in the TiN monolayer coating and no evident spalling