微波 ECR等离子体源离子注入法制备DLC薄膜.pdfVIP

第 23 卷 　第 6 期 真 　空 　科 　学 　与 　技 　术 　　　　　　　　　　 ( ) 　　　　　　　　　　　　　　 2003 年 11 、12 月 VACUUM SCIENCE AND TECHNOLOGY CHINA 429 　 微波 ECR 等离子体源离子注入法制备 DLC 薄膜 王金刚 　马国佳 　邓新绿 　李 　新 　唐祯安 (大连理工大学 　三束材料改性国家重点实验室 　辽宁大连 　116024) Growth of Diamond Like Carbon Films by MicrowaveElectronCyclotronResonancePlasmaSource Ion Implantation Wang Jingang ,Ma Guojia ,Deng Xinlu ,Li Xin and Tang Zhenan ( State Key Lab for Materials Modification by Electron , Ion , and Laser Beams , ) Dalian University of Technology , Liaoning , Dalian , 116024, China ( ) ( ) ( ) 　　Abstract 　Diamond like carbon DLC films were grown on Si 100 substrates by microwave electron cyclotron resonance ECR plasma source ion implantation (PSII) with methane as the working gas. The films were characterized with Raman spectroscopy ,Fourier transformation ( ) ( ) infrared spectroscopy FTIR ,atomic force microscopy AFM and nano indentation. Influence of gas flux on the film growth was also studied. ( ) ( ) 3 　　Keywords 　Diamond like carbon DLC ,ECR ,Plasma source ion implantation PSII ,sp ( ) ( ) ( ) 　　摘要 　用微波 ECR 等离子体源离子注入 PSII 法 ,在硅片 100 上制备了类金刚石 DLC 薄膜 ,工作气体采用 CH 气体 ,