金刚石薄膜的研究.pdfVIP

300191 CVD The research of diamond film Pang Peng Li Yan Chang Ming Tianjin University of Technology 300191 Abstract: In this paper, Boron-Doped Diamond (BDD) film of deposition is discussed. We use hot-filament-assisted chemical vapor deposition (HF-CVD) to prepare of undoped diamond film on Si, and use B O to prepare of BDD film. BDD film was studied with Raman spectroscopy. We find that 2 3 the grow rate of BDD is more slo