微透镜阵列在红外成像探测中空间应用与研究.pdfVIP

微透镜阵列在红外成像探测中的空间应用研究 作者：陈帅帅，钮新华 单位：中科院上海技术物理研究所，上海，200083 摘要 由于是接受目标自身的辐射，红外成像探测环境适应性强，可以昼夜工作， 并具有一定的伪装识别能力，是当今各国争相发展的一项探测技术，尤其是高分 辨率、高灵敏度的红外成像与探测。本文提出了一种是使用微透镜阵列和探测器 单片集成以提高红外系统成像分辨率和探测灵敏度的技术途径。针对空间用线列 红外探测器件设计了折射型微透镜阵列，并进行了仿真和评估。主要工作包括折 射型微透镜阵列的设计，选择透镜最佳会聚位置和排列方式，并使用 Zemax 软 件对理论设计的微透镜进行仿真。仿真结果表明，微透镜阵列与探测器的单片集 成对红外成像探测器性能的提高起到了积极的作用，具有重要的应用价值。 关键词 微光学，微透镜阵列，zemax 仿真，填充因子 Microlens Array in the Application of Infrared Space Imaging Detection Research Author ChenShuaishuai ，NiuXinhua Shanghai Institute of Technology and Physics, Chinese Academy of Sciences, Shanghai, 200083, China Abstract Because of accepting the target radiation, the environment adaptability of infrared imaging detection is strong and it can work day and night. It also has certain ability to identify the camouflage and is scrambling to be developed all over the world. This paper puts forward a technical approach to improve infrared imaging system resolution and detection sensitivity by monolithic integrated use of microlens array and detector. We design a refractive microlens array for line column infrared detectors and carry out a simulation and evaluation. Our main work includes the design of refractive microlens array and the best choice of lens focus place and lens arrangement mode. We use Zemax software to stimulate the theoretical design of microlens array. The stimulation proves that the monolithic integrated use of microlens array and detector plays a positive role in the performance of the infrared imaging detector. This technology has an important application value. Keywords micro optics, microlens array, zemax stimulation, filling factor 1 一、引言 在探测器响应率达到或接近背景极限的情况下，国际上先进的中高分辨率空