基于四极质谱计真空材料放气率测试方法及研究.pdfVIP

中国真空学会质谱分析和检漏专业委员会第十七届年会 中国计量测试学会真空计量专业委员会第十二届年会 基于四极质谱计的真空材料放气率测试方法研究 冯焱 董猛 李得天 成永军 赵澜 孙雯君 习振华 (兰州空间技术物理研究所，甘肃 兰州 730000) 摘要：在实际工程应用中，除了需要知道真空材料的总放气率之外，往往还关心的是材料放出 的某种单一气体的放气率。为此，本文提出了基于四极质谱计的真空材料放气率测试方法，通过采 用四极质谱计测量小孔两端的分压力来计算单一气体的放气率。基于该方法设计了测试装置，主要 由真空抽气系统、双通道气路转换测试系统、压力测量与质谱分析系统三部分组成。该方法的提出 可以解决测试材料单一气体放气率的问题，同时也提高了测试结果的准确性，其测量不确定度预估 为5.0%。 关键词：材料单一气体的放气率 双通道气路转换 四极质谱计 测试装置 Study on method for measuring vacuum materials partial outgassing rate FENG Yan, DONG Meng, LI De-tian, CHENG Yong-jun, ZHAO Lan, SUN wenjun, XI Zhen -hua ( Lanzhou Institute of Physics, Lanzhou 730000, China) Abstract ：In practical engineering application, the vacuum materials partial outgassing rate is much concerned except to need measuring materials total outgassing rate. So, this paper put forwards a method for measuring vacuum materials partial outgassing rate, and the outgassing rate can be known by measuring partial pressure of up-stream and down-stream sides of an orifice with quadrupole mass spectrometer. Based on the method, we design an outgassing measurement apparatus, which consists of pumping system, switching between two pumping paths (SPP) measurement system and system for pressure measurement and mass spectrometer analysis. The method can solve how to measure vacuum materials partial outgassing rate. Additionally, the accuracy of measurement results can be ensured. The relative standard-combined uncertainty of the method is estimated to be 5.0%. Key words ：Partial outgassing rate; SPP measurement; Quadrupole mass spectrometer ；Measurement apparatus 1 引言 材料放气率是评价材料尤其是真空材料的一个重要性能指标，其性能水平直接影响着设备的可 靠性和寿命。任何固体材料在大气环境下都能溶解、吸附一些气体。当材料置于真空中时就因解溶、 [1] 解吸而放气 。 对于真空材料的放气特性，国内外一直从事着相关的研究工作，主要着重于材料放气率测试方 法的改进和如何提高