扩散硅压力传感器热灵敏度漂移补偿方法的研究.pdfVIP

Review and Research 扩散硅压力传感器热灵敏度漂移补偿方法的研究 Research on Compensating Method for Thermal Sensitivity Drift of Silicon Pressure Transducer 1 2 3 张莉丽 戎华 刘仁 （1.西安交通大学，西安市 710049;2.南京师范大学，南京市 210097; 3.兰州炼油化工仪表厂，兰州市 730060） Zhang Lili1 Rong Hua2 Liu Ren3 ( 1. Xian Jiaotong University, Xian 710049; 2. Nanj ing Normal University, Nanj ing 2 10097; 3. Lanlian Instruments, Lanzhou 730060) 【摘 要】分析了恒压源供电和恒流源供电两种情况下扩散硅压力传感器的灵敏度随温度变化的关系式， 提出了用软件补偿其热灵敏度漂移的计算方法，并且就恒流源供电且灵敏度温度系数大于零的 情况，推出了用并联电阻补偿热灵敏度漂移时，并联电阻阻值的计算公式，模拟结果表明补偿 效果非常显著。 【关键词】压力传感器 热灵敏度漂移 补偿 Abstract: The relations between sensitivity of pressure transducer and temperature were analyzed. A compensating method by using compensating software to compensate the thermal sensitivity drift was suggested. To transducer stimulated by current source and its temperature coefficient of sensitivity is positive, and used a parallel resistor to compensate itsthermal sensitivity drift, an equation to calculate the compensating resistor was obtained. The simulating result indicated compensating effect was remarkable. Key words: Pressure Transducer Thermal Sensitivity Drift Compensation 引言 1.1恒压源供电的情况（图１） 扩散硅压力传感器因其独特的优点而获得了广 推导过程中所用符号的意义如下： 泛的应用，但其热灵敏度漂移的存在降低了其精度， R (P,t)，i=1,2,3,4是第i 个力敏电阻在压力为 i 影响了其在温度变化较大情况下的使用。对扩散硅 P 、温度为t 时