激光自混合微位移测量的FFT相位提取方法.pdfVIP

47, 071201(2010) Laser Optoelectronics Progress Z 2010 56 doi: 10. 3788/ LOP47.071201 激光自混合微位移测量的FFT相位提取方法 1, 2 1, 3 1 1, 2 张照云 高 杨 赵兴海 赵 翔 1 , 621 00; 2 , 100088 3 , 400044 ( FFT) , , ( SMLD) , FFT , 4 , , , 10 nm ; ; ; TN248 OCIS 120. 505 120. 1880 A FFT PhaseDetectionMethodfor Self-Mixing Laser Diode Micro-Displacement Measurement 1, 2 1, 3 1 1, 2 Zhang Zhaoyun Gao Yang Zhao Xinghai Zhao Xiang 1 In st itut e of Electron ic Engin eerin g, China Academ y of Engin eerin g Physics , Mian yang , Sichuan 621 00, Chin a 2 Departm ent of Graduate Stu den t , Chin a Academ y of En gineer ing Physics , Beijin g 100088, China 3 Key Laborat ory of Optoelectron ic Technology an d System , Min ist ry of Edu cat ion , Chon gqing Un iversit y , Chon gqin g 400044, China Abstract Fast Fourier transform (FFT ) phase detection method is used to analyze the self-mi ing interference signal, without increasing the systemcs comple ity. By this technique, the self-mi ing laser diode (SMLD) micro- displacement measurement technology can obtain nanometre measurement precision. The principle of the sel-f mi ing laser micro-displacement measurement technology is analyzed. The FFT phase detection signal processing is introduced. The optical feeding level, Fourier transform periods length, target moving speed and target vibrating range are analyzed by simulation. Simulation and e perimental results show that, this method is suitable to measure target with low speed and small moving range. Choosing pro