快速热退火对多层Ge量子点晶体质量的影响.pdfVIP

25 3 Vol.25 No.3 2 0 1 1 6 CHINESE JOURNAL OF MATERIALS RESEARCH June 2 0 1 1 Ge Æ ∗ (Æ 350108) (UHV/CVD) Si Ge , X (DCXRD) (Raman) Æ Ge , Ge : , Ge , 1000 20 s , , , Ge , X , TN304 1005-3093(2011)03-0259-04 Influence of Rapid Thermal Annealing on Ge Quantum Dots