基于数字全息的三维面形测试_郭晓明_陈晨_王文生.pdfVIP

第38 卷第1期 长春理工大学学报（自然科学版） Vol.38 No.1 2015 年2 月 Journal of Changchun University of Science and Technology （Natural Science Edition ） Feb.2015 基于数字全息的三维面形测试 郭晓明，陈晨，王文生 （长春理工大学 光电工程学院，长春 130022） 摘 要：三维面形测量一直是质量检测和逆向工程等领域的重要研究课题。基于双曝光数字全息干涉术的原理，设计了数 字全息记录测试装置，实现了三维面形的非接触测量；基于双光源法，在物光路采用垂直光轴方向移动透镜的方法，代替 了直接倾斜反射镜改变照明光束倾角的方法，实现了对物体面形的不同灵敏度测量。基于相移干涉术的原理，实现了四步 数字相移法，省去了压电位移器、位相控制器等硬件，简化了装置，从而实现了数字全息三维面形测试。实验表明，该方 法操作简单，测量精度高，并且简化了测试光学系统，其在照明光束角度改变量Δ =0.0382° μm β 时的精度可以达到2 。 关键词：三维面形测试；数字全息；双光源法；四步数字相移法；双曝光全息干涉术 中图分类号： TN26 文献标识码：A 文章编号：1672-9870（2015）01-0034-05 Three-dimensional Shape Test Based on Digital Holography GUOXiaoming，CHENChen，WANGWensheng （SchoolofOptoelectronicEngineering，ChangchunUniversityofScienceandTechnology，Changchun130022） Abstract：The measurement of three dimensional shape is an important research topic in the fields of quality detection， reverse engineering，etc.In this paper，based on the digital holographic principle，the measurement setup of digital holo- graphic recording was designed，and the three dimensional shape of an object was tested.Based on the double light source method，the method of tilting mirror was replaced by the method of moving lens in the direction perpendicular to the axis，so the shape of an object can be tested by different sensitivity.Based on the principle of phase-shifting in- terferometry，the four-step digital phase-shifting method was realized，so the piezoelectric translato，phase controller and other hardware were deleted.In addition，the experimental layout was simplified，and the measurement of three di- mensional shape was achieved.The experimental results show that this method is simple to ope