DARPA MTOMEMS LOGO.ppt

DARPA MTO/MEMS LOGO MEMS MTO DARPA DARPA The acronym, “MEMS”, dates from approximately 1989 when it was coined to describe primarily electrostatically and thermally driven systems. Here I give seven descriptive phrases to help define “MEMS” based on function and design intent. The seventh point is of particular relevance - can MEMS operating at microscale make a difference at the macroscale? Page * The acronym, “MEMS”, dates from approximately 1989 when it was coined to describe primarily electrostatically and thermally driven systems. Here I give seven descriptive phrases to help define “MEMS” based on function and design intent. The seventh point is of particular relevance - can MEMS operating at microscale make a difference at the macroscale?