多晶硅铸锭用坩埚烧结炉的设计.pdfVIP

EP E 电子工业专用设备 ·本期专题· Equipment for Electronic Products Manufacturing 多晶硅铸锭用坩埚烧结炉的设计 陈特超，李军阳，刘松，罗亮 ( 中国电子科技集团公司第四十八研究所， 湖南长沙 410111) 摘 要： 多晶硅铸锭时是将硅材料放在一个耐高温容器即坩埚中将硅料熔化、 冷却、 长晶的过 程。 装硅料的容器必须耐高温，不挥发，一般采用氧化硅陶瓷制造。 为了保证硅锭的纯度，在硅料 放入前需在坩埚内表面喷涂一层隔离材料 然后将此材料与坩埚在高温下形成一体。 坩埚烧结炉 , 就是将此喷涂物与坩埚烧结起来，形成牢固的隔离层。 本文介绍了设计方法提供了详细设计计 , 算过程介绍了设备的特点 并结合实际使用情况给出了测试数据。 , , 关键词： 多晶硅； 铸锭； 坩埚； 喷涂； 烧结炉； 实验 中图分类号： TF806.9 文献标识码： B 文章编号： 1004-4507(2009)08-0009-04 Design of Crucible Sintering Furnace for Polysilicon Ingot CHEN Techao, LI Junyang, LIU Song, LUO Liang (The 48th Research Institute of CETC, Changsha 410111, China) Abstract: The process of the polycrystalline silicon ingots is that the silicon material is placed into a high-temperature crucible for making them melt, cooling and crystaling. This kind of crucible is made from silicon oxide ceramic with the ability of high-temperature resistance and non-volatile. In order to ensure the purity of silicon ingots, a layer isolation material is sprayed on the inner surface of crucible before putting the silicon material in it, and then the isolation material and the crucible are integrated as one at high tempera- ture. The function of the crucible-sintering furnace is to integrate the isolation material and the crucible as a reliable isolated layer. In this paper, the design and calculation method for the crucible-sintering furnace is introd