DWDM窄带滤光片膜层的误差分析与监控策略.pdf

第30 卷 第3 期 激 光 技 术 VoI. 30 ，No. 3 2006 年6 月 LASER TECHNOLOGY June ，2006 文章编号：1001- 3806（2006 ）03- 0313- 04 DWDM 窄带滤光片膜层的误差分析与监控策略 1，2 1 ! 2 李晓平 ，易新建 ，史铁林 （1. 华中科技大学 光电子工程系，武汉430074 ；2 . 华中科技大学 微系统研究中心，武汉430074 ） 摘要：为了提高密集波分复用（DWDM ）薄膜窄带滤光片制备的成品率，讨论了用于DWDM 薄膜窄带滤光片在镀制 过程中的监控方法及误差，采用Monte CarIo 允差分析原理分析用于DWDM 窄带滤光片膜层的容差，以便选择更易制备 的膜系；计算膜层的MacIeod 极值灵敏度，得到所选膜系各个膜层的误差要求；模拟光学监控过程和计算膜层导纳，能够 得到膜层制备过程中膜层之间膜厚的补偿关系。实验表明，据此制定的膜厚监控策略，对于DWDM 窄带滤光片膜层的 制备和保证成品率是非常关键的。 关键词：光学；窄带滤光片；误差与膜厚监控；密集波分复用 中图分类号：O484 . 4 + 1 文献标识码：A Error analysis and coating thickness control method for the narrow band DWDM filter LI Xiao-p ing 1，2 ，YI Xin- ian1 ，SHI Tie-lin2 （1. Department of Opto-EIectronics Engineering ，HUST ，Wuhan 430074 ，China ；2 . Institute of Microsystems ，HUST ，Wuhan 430074 ，China ） Abstract ：To improve the productivity of fabrication of the narrow band DWDM fiIm fiIter ，the monitoring method and error in coating this fiIm is discussed. Monte CarIo method is used to modeI the toIerance of the Iayer for the fiIter ，and the resuIts are used to seIect the easy coating fiIm system. The fiIm thickness error of each Iayer is obtained by caIcuIating the MacIeod maximum sensitivity. The compensation of the fiIm thickness between each Iayer is obtained by modeIing the opticaI monitoring processes and the fiIm admittance. The strategy of controIIing the fiIm thickness is obtained through the above measures，and the experiments have proved that this is cruciaI to coating the fiIm for the fiIter and impoving the productivity. Key words ：optics ；narrow band