一种基于临近点集数据融合的AFM动态成像方法.pdfVIP

Proceedings of the 29th Chinese Control Conference July 29-31, 2010, Beijing, China 一种基于临近点集数据融合的AFM动态成像方法* 董晓坤，方勇纯，张玉东 南开大学信息学院机器人所，天津 300071 E-mail: yfang@robot.nankai.edu.cn 要: 原子力显微镜(AFM)是纳米技术和纳米操作领域中最重要的研究工具之一。本文针对扫描成像的原子力显 微镜，提出了一种改进的AFM动态成像方法，该方法分析了AFM系统中样品与针尖之间的非线性力对成像精度的 影响，通过对扫描过程中获得的成像数据进行融合滤波，有效地提高了快速AFM 的成像精度。具体而言，论文 先分析了原子力显微镜当前成像方法存在的主要问题，然后针对在高速扫描或者样品形貌高度有突变时，因AFM 系统中非线性因素而引起的成像误差，提出了一种基于临近点集数据融合的改进动态成像方法，以提高AFM对于 样品表面形貌的成像精度。最后利用原子力显微镜仿真平台数据，验证了本文提出的改进成像方法的性能。 关键词: 原子力显微镜, 扫描成像技术, 数据融合, 滤波技术, 动态特性 An Improved AFM Dynamic Imaging Method Based on * Data Fusion of Neighboring Points Set DONG Xiaokun, FANG Yongchun, ZHANG Yudong Institute of Robotics and Automatic Information System, Nankai University, Tianji n 300071, P.R.China E-mail: yfang@robot.nankai.edu.cn Abstract: An atomic force microscopy is an important tool in the field of nanotechnology and nanomanipulation. Based on the filtering and data fusion method, this paper proposes an innovative improved imaging method to enhance the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized among commercial AFMs, then an improved dynamic imaging method based on data fusion of neighboring points set is presented to deal with the large imaging error along Z direction due to the AFM nonlinear characteristics when scanning a highly coarse surface or scanning with high speed. Finally some simulation results are included to demonstrate the superior performance of the proposed imaging method. Key Words: Atomic Force Microscopy, Imaging Technology, Data Fus