MEMS平面S型锥形弹簧的特性分析研究周织建.pdfVIP

44 4 Vol. 44, No. 4 2014 8 Microelectronics Aug. 2014 MEMS S ( 210094) MEMS S MEMS S y 1.58 % B H Rnλ L1 S S MEMS TH703 A 1004-3365(2014)04-0559-06 DOI:10.13911/j.cnki.1004-3365.2014.04.035 Study on Characteristics of MEMS Planar S-Form Conical Spring ZHOU Zhijian, NIE Weirong, XI Zhanwen, WANG Xiaofeng, CHENG Jianjian (School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, P. R. China) Abstract: A MEMS planar S-form conical spring has been proposed for the poor column stability, anti-resonance behavior etc. of equal straight beam spring. The stiffness coefficient formula in the У direction of conical spring has been obtained and it has been verified by simulating. The average error between the theoretical value and the results of the simulation is less than 1.58 % while a concentrated force is applied. Then the effect of the structure parameters on the stiffness coefficient of spring is analyzed. The results showed that the stiffness coefficient of conical spring increases with the increase of spring width B and spring height H, and decreases as the spring radius R, the number of segments n, the increment of straight beam λ and the length of the first straight beam L become large. At last, with the same rigidity in 1 the y direction, the performances of two S-formed springs are comparatively analyzed. The results revealed that the axial space utilization, column stability and anti-resonance behavior of conical spring are superior to the equal-L spring. S-form conical spring; MEMS; Stiffness coefficie