Effects of deposition dynamics on epitaxial growth.pdfVIP

Effects of deposition dynamics on epitaxial growth Jikeun Seo,1 Hye-Young Kim,2 and J.-S. Kim3 1Department of Ophthalmic Optics, Chodang University, Muan 534-701, Korea 2 Department of Physics, The Pennsylvania State University, University Park, PA 16802 3Department of Physics, Sook-Myung Women’s University, Seoul, 140-742, Republic of Korea 6 (Dated: February 6, 2008) 0 0 The dynamic effects, such as the steering and the screening effects during deposition, on an epitax- 2 ial growth (Cu/Cu(001)), is studied by kinetic Monte Carlo simulation that incorporates molecular r dynamic simulation to rigorously take the interaction of the deposited atom with the substrate p atoms into account. We find three characteristic features of the surface morphology developed by A grazing angle deposition: (1) enhanced surface roughness, (2) asymmetric mound, and (3) asym- metric slopes of mound sides. Regarding their dependence on both deposition angle and substrate 0 temperature, a reasonable agreement of the simulated results with the previous experimental ones 1 is found. The characteristic growth features by grazing angle deposition are mainly caused by the inhomogeneous deposition flux due to the steering and screening effects, where the steering effects ] i play the major role rather than the screening effects. Newly observed in the present simulation is c that the side of mound in each direction is composed of various fa