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27-A MEMS-based piezoelectric power generator array for vibration.pdf
ARTICLE IN PRESS
Microelectronics Journal 39 (2008) 802–806
/locate/mejo
A MEMS-based piezoelectric power generator array for vibration
energy harvesting
a, a b b a
Jing-Quan Liu , Hua-Bin Fang , Zheng-Yi Xu , Xin-Hui Mao , Xiu-Cheng Shen ,
Di Chena b a
, Hang Liao , Bing-Chu Cai
aNational Key Lab of Micro/Nano Fabrication Technology, Key Lab for Thin Film and Micro-fabrication Technology of Ministry of Education,
Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, PR China
bACS Sensors Lab, Honeywell, Shanghai 201203, PR China
Received 13 September 2007; accepted 15 December 2007
Available online 20 February 2008
Abstract
Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level
ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power
output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this
paper, a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power
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