《spie-laser micromachining》.pdf

Laser micromachining - new techniques and developments for display applications Nadeem Rizvi a, Jako Greuters a, Jason Dallimore a, Keren Hamilton b, Robin Clabburn b Bran Ebsworth b a Exitech Limited, Hanborough Park, Long Hanborough, Oxford OX8 8LH, UK b Microsharp Corporation Limited, 52 Shrivenham Hundred Business Park, Watchfield, Swindon SN6 8TY, UK ABSTRACT The area of display devices has experienced extremely rapid growth in recent years and these advances show no sign of declining. One of the major developments in this field has been the use of lasers for various microfabrication tasks. This paper describes some techniques which have been developed using excimer lasers for the production of novel microstructures in polymer materials. Examples of the types of microstructures which are produced are presented and their applicability for display device applications is outlined. Forthcoming developments in the laser manufacture of displays are discussed. Keywords: excimer lasers, microstructures, ablation, mask projection, micromachining, displays, diffusers, microprisms. 1. INTRODUCTION The recent rise in digital communications and multi-media systems has led to increasingly complex technical demands being placed on personal electronic products, interactive entertainment aids and commercial and domestic display devices. Some of these developments have partly been driven by the requirements of volume manufacturing but other significant elements have had to be addressed purely due to the novel nature of modern microelectronic systems. To meet these demands, lasers are now being widely