《沉积温度对Ge2Sb2Te5溅射薄膜结构、电／光性质的影响》.pdfVIP

RareMetalMaterialsandEngineering Availableonlineatwww．sciencedirect．com Volume39，Issue3，March2010 OnlineEnglisheditionoftheChineselanguagejourna Direct Influences ofSubstrate Temperature on Structure，Elec- tricaland OpticalProperties ofMagnetron Sputtering Ge2Sb2Te5FllmS SunHuajun’-一， HouLisong’， MiaoXiangshui， WuYiqun’ ShanghaiInstituteofOpticsandFineMechanics，ChineseAcademyofSconces，Shanghai201800,China； Huazhong Universityof ScienceandTechnology,Wuhan430