Friction and wear properties of CrSiCN coatings with low carbon content as sliding against SiC and steel balls in water》.pdfVIP

Tribology International 94 (2016) 176 –186 Contents lists available at ScienceDirect Tribology International journal homepage: /locate/triboint Friction and wear properties of CrSiCN coatings with low carbon content as sliding against SiC and steel balls in water a,b,c a,b,n d e f e Zhiwei Wu , Fei Zhou , Kangmin Chen , Qianzhi Wang , Zhifeng Zhou , Jiwang Yan , Lawrence Kwok-Yan Li f a State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China b College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics and Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing 210016, China c College of Mechanical and Electrical Engineering, Nanjing Forestry University, Nanjing 210037, China d Center of Analysis, Jiangsu University, Zhenjiang 212013, China e Department of Mechanical Engineering, Keio University, Yokohama 2238522, Japan f Advanced Coatings Applied Research Laboratory, Department of Mechanical and Biomedical Engineering, City University of Hong Kong, 83 Tat Chee Aven ue, Kowloon, Hong Kong, China a r t i c l e i n f o a b s t r a c t Article history: CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron Received 22 May 2015 sputtering system via adjusting the trimethylsilane (TMS) flows, and their compo