Qualitative and quantitative analysis of acoustomigration effects in SAW-devices》.pdf

Microelectronic Engineering 82 (2005) 655–659 /locate/mee Qualitative and quantitative analysis of acoustomigration effects in SAW-devices F. Kubat a,*, W. Ruile a, C. Eberl b, T. Hesjedal c, L.M. Reindl d a EPCOS AG, SAW Division, Munich, Germany b Institute of Physical Metallurgy, University of Stuttgart, Germany c Paul –Drude-Institute for Solid State Electronics Berlin, Germany d Institute of Microsystem Technology, Electrical Measurement and Testing, University of Freiburg, Germany Available online 24 August 2005 Abstract Low-loss surface acoustic wave (SAW) filters are widely used in modern mobile phones, especially for front-end applications. Therefore high power durability of the SAW-structure is required. In order to develop an appropriate met- allization the mechanism of acoustomigration has to be investigated in more detail. For this purpose, we designed a two-port test resonator which enables us to investigate acoustomigration in thin films. With a standard measuring pro- cedure to quantify the power durability of metallization it is possible to investigate acoustomigration effects in thin lay- ers systematically. For a better understanding of acoustomigration, we analysed the defect structure by different microscopy techniques as a function of the driving power, testing time and temperature. By in situ tests it was possible for the first time to investigate the growing of extrusions and cracks in real time on a submicron scale. We found a cor- relation between the loading and the measured number of extrusions as well as the frequency