SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement》.pdfVIP

Sensors and Actuators A 189 (2013) 204–211 Contents lists available at SciVerse ScienceDirect Sensors and Actuators A: Physical j o u r n a l h o m e p ag e: w w w. elsev /locate/sna SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement J.-G. Kim a , T.-J. Lee b , N.-C. Park a , Y.-P. Park a , K.-S. Park a,∗ a Department of Mechanical Engineer