原创力文档Silicon cantilever arrays with by-pass metal through-silicon-via (TSV) tips for micromachined IC testing probe cards》.pdfVIP
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Silicon cantilever arrays with by-pass metal through-silicon-via (TSV) tips for micromachined IC testing probe cards》.pdf
Microelectronic Engineering 86 (2009) 2211–2216
Contents lists available at ScienceDirect
Microelectronic Engineering
journal homepage: www.else /locate/mee
Silicon cantilever arrays with by-pass metal through-silicon-via (TSV) tips
for micromachined IC testing probe cards
Fei Wang, Xinxin Li *, Rong Cheng, Kewei Jiang, Songlin Feng
State Key Laboratory of Trans
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