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Sputter depth profiling of MoB4CSi and MoSi multilayer nanostructures A round-robin characterization by different techniques》.pdfVIP

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Sputter depth profiling of MoB4CSi and MoSi multilayer nanostructures A round-robin characterization by different techniques》.pdf

    Sputter depth profiling of MoB4CSi and MoSi multilayer nanostructures A round-robin characterization by different techniques》.pdf

    Thin Solid Films 540 (2013) 96–105 Contents lists available at SciVerse ScienceDirect Thin Solid Films journal homepage: www.el sevier.c om/l oc ate/ tsf Sputter depth profiling of Mo/B C/Si and Mo/Si multilayer 4 nanostructures: A round-robin characterization by different techniques B. Ber a, P. Bábor b,c, P.N. Brunkov a, P. Chapon d,

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