平面三自由度柔微定位平台结构与设计研究.pdfVIP

万方数据 3-PRR 3-RRR 3-PRR ANSYS ANSYS ANSYS 3-PRR ANSYS I 万方数据 Abstract Abstract In recent years, with the development of the semiconductor integrated technology, biological engineering, measurement science and technology, nano science and technology, the demands for precise positioning technology of system and equipment are increasing high. Based on the analysis of the key institution of the existing compliant micro positioning platform, a three DOF compliant micro positioning platform which uses different types