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IN-SITUANNEALINGOFCu(In,Ga)Se2FILMSGROWNBY.PDF
IN-SITU ANNEALING OF Cu(In,Ga)Se FILMS GROWN BY ELEMENTAL CO-
2
EVAPORATION
James D. Wilson, Robert W. Birkmire, William N. Shafarman
Institute of Energy Conversion, University of Delaware, Newark, DE 19716
ABSTRACT behavior and consider the issue of a relationship between
microstructure and device performance.
The effect of in-situ post-deposition annealing on
Cu(InGa)Se films grown by elemental co-evaporation on EXPERIMENTAL APPROACH
2
microstructure and solar cell performance has been
characterized. Films were deposited at a substrate Cu(InGa)Se films were deposited on 1”x1” Mo-
2
temperature of 400°C and then annealed in-situ at 400°C, coated SLG substrates in a stationary bell-jar system
475°C, 500°C and 550°C for times from 1 - 60 min. using thermal evaporation from four Knudsen-type
Devices made from films grown at 400°C and then elemental sources (copper, indium, gallium and selenium).
annealed at 550°C for 1 minute had comparable efficiency Source fluxes were held constant throughout the
to devices made from films grown at 550°C. Little or no
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